IP Library Granted Patent US 4,401,689
Granted Patent Utility
US 4,401,689 · App. 06/201,437

Radiation heated reactor process for chemical vapor deposition on substrates

Inventor: Vladimir Sinisa Ban
Patented Case View Patent ↗
Granted: Aug 30, 1983 Filed: Oct 28, 1980
Inventor
Vladimir Sinisa Ban
Assignee (at issue)
RCA Corporation

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Quick Facts
Patent No.
US 4,401,689
App. No.
06/201,437
Filed
1980-10-28
Granted
1983-08-30
Kind
A