Granted Patent
Utility
US 4,402,613 · App. 06/024,944
Surface inspection system
Inventors:
John K. Daly, Malvin D. Terry
Patented Case
View Patent ↗
Granted: Sep 6, 1983
Filed: Mar 29, 1979
Inventors
John K. Daly
Malvin D. Terry
Assignee (at issue)
Advanced Semiconductor Materials America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.