Granted Patent
Utility
US 4,405,864 · App. 06/300,118
Ion implanter end processing station
Inventor:
Eddy H. del Rio
Patented Case
View Patent ↗
Granted: Sep 20, 1983
Filed: Sep 8, 1981
Inventor
Eddy H. del Rio
Assignee (at issue)
RCA Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.