Granted Patent
Utility
US 4,407,713 · App. 06/290,426
Cylindrical magnetron sputtering cathode and apparatus
Inventor:
Bogdan Zega
Patented Case
View Patent ↗
Granted: Oct 4, 1983
Filed: Aug 6, 1981
Inventor
Bogdan Zega
Assignee (at issue)
Battelle Development Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.