Granted Patent
Utility
US 4,408,563 · App. 06/260,484
Apparatus for regulating the evaporation rate of oxidizable substances in reactive vacuum deposition
Inventors:
Klaus-Jurgen Heimbach, Walter Zultzke
Patented Case
View Patent ↗
Granted: Oct 11, 1983
Filed: May 4, 1981
Inventors
Klaus-Jurgen Heimbach
Walter Zultzke
Assignee (at issue)
Leybold-Heraeus GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.