IP Library Granted Patent US 4,412,502
Granted Patent Utility
US 4,412,502 · App. 06/467,402

Apparatus for the elimination of edge growth in liquid phase epitaxy

Inventor: Suei-Yuen P. Lien
Patented Case View Patent ↗
Granted: Nov 1, 1983 Filed: Feb 17, 1983
Inventor
Suei-Yuen P. Lien
Assignee (at issue)
Western Electric Company, Inc.

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Quick Facts
Patent No.
US 4,412,502
App. No.
06/467,402
Filed
1983-02-17
Granted
1983-11-01
Kind
A