IP Library Granted Patent US 4,417,968
Granted Patent Utility
US 4,417,968 · App. 06/477,069

Magnetron cathode sputtering apparatus

Inventor: Harold E. McKelvey
Patented Case View Patent ↗
Granted: Nov 29, 1983 Filed: Mar 21, 1983
Inventor
Harold E. McKelvey
Assignee (at issue)
Shatterproof Glass Corp.

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Quick Facts
Patent No.
US 4,417,968
App. No.
06/477,069
Filed
1983-03-21
Granted
1983-11-29
Kind
A