Granted Patent
Utility
US 4,419,013 · App. 06/280,878
Phase contrast alignment system for a semiconductor manufacturing apparatus
Inventor:
Richard J. Heimer
Patented Case
View Patent ↗
Granted: Dec 6, 1983
Filed: Jul 6, 1981
Inventor
Richard J. Heimer
Assignee (at issue)
TRE Semiconductor Equipment Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.