Granted Patent
Utility
US 4,420,385 · App. 06/485,556
Apparatus and process for sputter deposition of reacted thin films
Inventor:
Larry D. Hartsough
Patented Case
View Patent ↗
Granted: Dec 13, 1983
Filed: Apr 15, 1983
Inventor
Larry D. Hartsough
Assignee (at issue)
Gryphon Products
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.