IP Library Granted Patent US 4,422,916
Granted Patent Utility
US 4,422,916 · App. 06/347,699

Magnetron cathode sputtering apparatus

Inventor: Harold E. McKelvey
Patented Case View Patent ↗
Granted: Dec 27, 1983 Filed: Feb 11, 1982
Inventor
Harold E. McKelvey
Assignee (at issue)
Shatterproof Glass Corp.

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Quick Facts
Patent No.
US 4,422,916
App. No.
06/347,699
Filed
1982-02-11
Granted
1983-12-27
Kind
A