IP Library Granted Patent US 4,423,701
Granted Patent Utility
US 4,423,701 · App. 06/363,256

Glow discharge deposition apparatus including a non-horizontally disposed cathode

Inventors: Prem Nath, David A. Gattuso
Patented Case View Patent ↗
Granted: Jan 3, 1984 Filed: Mar 29, 1982
Inventors
Prem Nath
David A. Gattuso
Assignee (at issue)
Energy Conversion Devices, Inc.

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Quick Facts
Patent No.
US 4,423,701
App. No.
06/363,256
Filed
1982-03-29
Granted
1984-01-03
Kind
A