Granted Patent
Utility
US 4,425,218 · App. 06/363,453
Gas distribution system for sputtering cathodes
Inventor:
Merrill G. Robinson
Patented Case
View Patent ↗
Granted: Jan 10, 1984
Filed: Mar 30, 1982
Inventor
Merrill G. Robinson
Assignee (at issue)
Shatterproof Glass Corp.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.