Granted Patent
Utility
US 4,425,508 · App. 06/375,867
Electron beam lithographic apparatus
Inventors:
George C. Lewis, Robert A. Vanslette
Patented Case
View Patent ↗
Granted: Jan 10, 1984
Filed: May 7, 1982
Inventors
George C. Lewis
Robert A. Vanslette
Assignee (at issue)
GCA Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.