IP Library Granted Patent US 4,425,871
Granted Patent Utility
US 4,425,871 · App. 06/267,038

Apparatus for sensing deposition of a thin film layer of a material

Inventor: Richard Martin
Patented Case View Patent ↗
Granted: Jan 17, 1984 Filed: May 26, 1981
Inventor
Richard Martin
Assignee (at issue)
Applied Magnetics, LLC

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Quick Facts
Patent No.
US 4,425,871
App. No.
06/267,038
Filed
1981-05-26
Granted
1984-01-17
Kind
A