Granted Patent
Utility
US 4,426,264 · App. 06/330,367
Method and means for controlling sputtering apparatus
Inventors:
Wolf-Dieter Munz, Hans Wolf
Patented Case
View Patent ↗
Granted: Jan 17, 1984
Filed: Dec 14, 1981
Inventors
Wolf-Dieter Munz
Hans Wolf
Assignee (at issue)
Leybold-Heraeus GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.