Granted Patent
Utility
US 4,426,767 · App. 06/338,204
Selective epitaxial etch planar processing for gallium arsenide semiconductors
Inventors:
Alan W. Swanson, Charles R. Snider, Frank H. Spooner
Patented Case
View Patent ↗
Granted: Jan 24, 1984
Filed: Jan 11, 1982
Inventors
Alan W. Swanson
Charles R. Snider
Frank H. Spooner
Assignee (at issue)
Sperry Corp.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.