IP Library › Granted Patent US 4,428,811
Granted Patent Utility
US 4,428,811 · App. 06/481,953

Rapid rate reactive sputtering of a group IVb metal

Inventors: William D. Sproul, James R. Tomashek
Patented Case View Patent ↗
Granted: Jan 31, 1984 Filed: Apr 4, 1983
Inventors
William D. Sproul
James R. Tomashek
Assignee (at issue)
BorgWarner Inc.

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Quick Facts
Patent No.
US 4,428,811
App. No.
06/481,953
Filed
1983-04-04
Granted
1984-01-31
Kind
A