Granted Patent
Utility
US 4,433,384 · App. 06/309,156
Pattern data handling system for an electron beam exposure system
Inventors:
Donald W. Berrian, Billy W. Ward
Patented Case
View Patent ↗
Granted: Feb 21, 1984
Filed: Oct 5, 1981
Inventors
Donald W. Berrian
Billy W. Ward
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.