Granted Patent
Utility
US 4,436,985 · App. 06/373,978
Apparatus for heat treating semiconductor wafers
Inventor:
T. Jerome Weber
Patented Case
View Patent ↗
Granted: Mar 13, 1984
Filed: May 3, 1982
Inventor
T. Jerome Weber
Assignee (at issue)
GCA Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.