IP Library Granted Patent US 4,440,799
Granted Patent Utility
US 4,440,799 · App. 06/435,971

Monitor for impurity levels in aluminum deposition

Inventor: Thomas J. Faith, Jr.
Patented Case View Patent ↗
Granted: Apr 3, 1984 Filed: Oct 22, 1982
Inventor
Thomas J. Faith, Jr.
Assignee (at issue)
RCA Corporation

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Quick Facts
Patent No.
US 4,440,799
App. No.
06/435,971
Filed
1982-10-22
Granted
1984-04-03
Kind
A