Granted Patent
Utility
US 4,441,124 · App. 06/318,523
Technique for inspecting semiconductor wafers for particulate contamination
Inventors:
Richard W. Heebner, Randal L. Schmitt
Patented Case
View Patent ↗
Granted: Apr 3, 1984
Filed: Nov 5, 1981
Inventors
Richard W. Heebner
Randal L. Schmitt
Assignee (at issue)
Western Electric Company, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.