Granted Patent
Utility
US 4,443,295 · App. 06/503,976
Method of etching refractory metal film on semiconductor structures utilizing triethylamine and H.sub.2 O.sub.2
Inventors:
Kenneth Radigan, James M. Cleeves
Patented Case
View Patent ↗
Granted: Apr 17, 1984
Filed: Jun 13, 1983
Inventors
Kenneth Radigan
James M. Cleeves
Assignee (at issue)
Fairchild Camera & Instrument Corp.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.