Granted Patent
Utility
US 4,444,617 · App. 06/456,183
Reactive ion etching of molybdenum silicide and N+ polysilicon
Inventor:
Eugene Coleman Whitcomb
Patented Case
View Patent ↗
Granted: Apr 24, 1984
Filed: Jan 6, 1983
Inventor
Eugene Coleman Whitcomb
Assignee (at issue)
Rockwell International Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.