Granted Patent
Utility
US 4,444,618 · App. 06/471,617
Processes and gas mixtures for the reactive ion etching of aluminum and aluminum alloys
Inventors:
Richard Joseph Saia, Bernard Gorowitz
Patented Case
View Patent ↗
Granted: Apr 24, 1984
Filed: Mar 3, 1983
Inventors
Richard Joseph Saia
Bernard Gorowitz
Assignee (at issue)
General Electric Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.