Granted Patent
Utility
US 4,445,039 · App. 06/280,416
High throughput/high resolution particle beam system
Inventor:
Nelson Yew
Patented Case
View Patent ↗
Granted: Apr 24, 1984
Filed: Jul 6, 1981
Inventor
Nelson Yew
Assignee (at issue)
PerkinElmer, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.