Granted Patent
Utility
US 4,445,966 · App. 06/505,624
Method of plasma etching of films containing chromium
Inventors:
Robert J. Carlson, Daniel Youngner
Patented Case
View Patent ↗
Granted: May 1, 1984
Filed: Jun 20, 1983
Inventors
Robert J. Carlson
Daniel Youngner
Assignee (at issue)
Honeywell Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.