Granted Patent
Utility
US 4,448,875 · App. 06/480,636
Electron beam sensitive mixture resist
Inventor:
David F. Lewis
Patented Case
View Patent ↗
Granted: May 15, 1984
Filed: Mar 31, 1983
Inventor
David F. Lewis
Assignee (at issue)
GAF Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.