Granted Patent
Utility
US 4,448,876 · App. 06/447,381
Electron beam sensitive resist
Inventors:
Donald H. Lorenz, Earl P. Williams
Patented Case
View Patent ↗
Granted: May 15, 1984
Filed: Dec 6, 1982
Inventors
Donald H. Lorenz
Earl P. Williams
Assignee (at issue)
GAF Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.