IP Library › Granted Patent US 4,449,885
Granted Patent Utility
US 4,449,885 · App. 06/381,085

Wafer transfer system

Inventors: Richard J. Hertel, Edward D. MacIntosh
Patented Case View Patent ↗
Granted: May 22, 1984 Filed: May 24, 1982
Inventors
Richard J. Hertel
Edward D. MacIntosh
Assignee (at issue)
Varian, Inc.

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Quick Facts
Patent No.
US 4,449,885
App. No.
06/381,085
Filed
1982-05-24
Granted
1984-05-22
Kind
A