Granted Patent
Utility
US 4,450,652 · App. 06/299,378
Temperature control for wafer polishing
Inventor:
Robert J. Walsh
Patented Case
View Patent ↗
Granted: May 29, 1984
Filed: Sep 4, 1981
Inventor
Robert J. Walsh
Assignee (at issue)
Monsanto Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.