Granted Patent
Utility
US 4,453,080 · App. 06/284,915
Temperature control of a workpiece under ion implantation
Inventor:
Edward H. Berkowitz
Patented Case
View Patent ↗
Granted: Jun 5, 1984
Filed: Jul 20, 1981
Inventor
Edward H. Berkowitz
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.