IP Library Granted Patent US 4,456,433
Granted Patent Utility
US 4,456,433 · App. 06/303,666

Method for assembling a single-flow turbomolecular vacuum pump, and a turbomolecular vacuum pump assembled by said method

Inventors: Hans-Heinrich Henning, Hansen Pfaff
Patented Case View Patent ↗
Granted: Jun 26, 1984 Filed: Sep 18, 1981
Inventors
Hans-Heinrich Henning
Hansen Pfaff
Assignee (at issue)
Leybold-Heraeus GmbH

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Quick Facts
Patent No.
US 4,456,433
App. No.
06/303,666
Filed
1981-09-18
Granted
1984-06-26
Kind
A