Granted Patent
Utility
US 4,456,879 · App. 06/298,581
Method and apparatus for determining the doping profile in epitaxial layers of semiconductors
Inventor:
Hans P. Kleinknecht
Patented Case
View Patent ↗
Granted: Jun 26, 1984
Filed: Sep 2, 1981
Inventor
Hans P. Kleinknecht
Assignee (at issue)
RCA Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.