IP Library Granted Patent US 4,459,937
Granted Patent Utility
US 4,459,937 · App. 06/397,646

High rate resist polymerization apparatus

Inventor: Addison B. Jones
Patented Case View Patent ↗
Granted: Jul 17, 1984 Filed: Jul 12, 1982
Inventor
Addison B. Jones
Assignee (at issue)
Rockwell International Corporation

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Quick Facts
Patent No.
US 4,459,937
App. No.
06/397,646
Filed
1982-07-12
Granted
1984-07-17
Kind
A