IP Library Granted Patent US 4,460,413
Granted Patent Utility
US 4,460,413 · App. 06/331,612

Method of patterning device regions by oxidizing patterned aluminum layer

Inventors: Kazuo Hirata, Masatoshi Oda
Patented Case View Patent ↗
Granted: Jul 17, 1984 Filed: Dec 17, 1981
Inventors
Kazuo Hirata
Masatoshi Oda
Assignee (at issue)
Nippon Telegraph and Telephone Public Corporation

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Quick Facts
Patent No.
US 4,460,413
App. No.
06/331,612
Filed
1981-12-17
Granted
1984-07-17
Kind
A