Granted Patent
Utility
US 4,460,435 · App. 06/562,530
Patterning of submicrometer metal silicide structures
Inventor:
Jer-Shen Maa
Patented Case
View Patent ↗
Granted: Jul 17, 1984
Filed: Dec 19, 1983
Inventor
Jer-Shen Maa
Assignee (at issue)
RCA Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.