Granted Patent
Utility
US 4,465,368 · App. 06/335,733
Exposure apparatus for production of integrated circuit
Inventors:
Toshio Matsuura, Kyoichi Suwa, Hisayuki Shimizu, Akikazu Tanimoto
Patented Case
View Patent ↗
Granted: Aug 14, 1984
Filed: Dec 30, 1981
Inventors
Toshio Matsuura
Kyoichi Suwa
Hisayuki Shimizu
Akikazu Tanimoto
Assignee (at issue)
Nippon Kogaku K.K.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.