Granted Patent
Utility
US 4,466,872 · App. 06/452,580
Methods of and apparatus for depositing a continuous film of minimum thickness
Inventor:
Itamar B. Einbinder
Patented Case
View Patent ↗
Granted: Aug 21, 1984
Filed: Dec 23, 1982
Inventor
Itamar B. Einbinder
Assignee (at issue)
AT&T Technologies Incorporated
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.