Granted Patent
Utility
US 4,466,940 · App. 06/406,612
Multicomponent alloy for sputtering targets
Inventors:
G. A. Horst Siewert, Horst Dietrich, Wolf-Dieter Munz, Jorg Goebel
Patented Case
View Patent ↗
Granted: Aug 21, 1984
Filed: Aug 9, 1982
Inventors
G. A. Horst Siewert
Horst Dietrich
Wolf-Dieter Munz
Jorg Goebel
Assignees (at issue)
Demetron Gesellschaft fuer Elektronik-Werkstoffe m.b.H.
Leybold-Heraeus GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.