Granted Patent
Utility
US 4,469,950 · App. 06/354,822
Charged particle beam exposure system utilizing variable line scan
Inventors:
Norman J. Taylor, Paul F. Petric
Patented Case
View Patent ↗
Granted: Sep 4, 1984
Filed: Mar 4, 1982
Inventors
Norman J. Taylor
Paul F. Petric
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.