Granted Patent
Utility
US 4,472,459 · App. 06/545,048
Local oxidation of silicon substrate using LPCVD silicon nitride
Inventor:
Albert W. Fisher
Patented Case
View Patent ↗
Granted: Sep 18, 1984
Filed: Oct 24, 1983
Inventor
Albert W. Fisher
Assignee (at issue)
RCA Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.