IP Library Granted Patent US 4,472,738
Granted Patent Utility
US 4,472,738 · App. 06/381,469

Pattern testing apparatus

Inventors: Kazunari Hada, Norio Fujii, Atsushi Kawahara, Toru Azuma, Junji Hazama
Patented Case View Patent ↗
Granted: Sep 18, 1984 Filed: May 24, 1982
Inventors
Kazunari Hada
Norio Fujii
Atsushi Kawahara
Toru Azuma
Junji Hazama
Assignee (at issue)
Nippon Kogaku K.K.

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Quick Facts
Patent No.
US 4,472,738
App. No.
06/381,469
Filed
1982-05-24
Granted
1984-09-18
Kind
A