Granted Patent
Utility
US 4,473,455 · App. 06/473,261
Wafer holding apparatus and method
Inventors:
Robert E. Dean, James L. Fink
Patented Case
View Patent ↗
Granted: Sep 25, 1984
Filed: Mar 14, 1983
Inventors
Robert E. Dean
James L. Fink
Assignee (at issue)
AT&T Bell Laboratories
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.