Granted Patent
Utility
US 4,474,463 · App. 06/412,825
Mixer coupling lens subassembly for photolithographic system
Inventor:
Richard J. Heimer
Patented Case
View Patent ↗
Granted: Oct 2, 1984
Filed: Aug 30, 1982
Inventor
Richard J. Heimer
Assignee (at issue)
TRE Semiconductor Equipment Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.