Granted Patent
Utility
US 4,474,621 · App. 06/388,969
Method for low temperature ashing in a plasma
Inventors:
Edward J. Saccocio, Mark E. Holycross
Patented Case
View Patent ↗
Granted: Oct 2, 1984
Filed: Jun 16, 1982
Inventors
Edward J. Saccocio
Mark E. Holycross
Assignee (at issue)
International Telephone and Telegraph Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.