Granted Patent
Utility
US 4,475,122 · App. 06/319,782
Automatic wafer alignment technique
Inventor:
Lawrence S. Green
Patented Case
View Patent ↗
Granted: Oct 2, 1984
Filed: Nov 9, 1981
Inventor
Lawrence S. Green
Assignee (at issue)
TRE Semiconductor Equipment Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.