IP Library Granted Patent US 4,477,962
Granted Patent Utility
US 4,477,962 · App. 06/397,050

Process for and structure of high density VLSI circuits, having self-aligned gates and contacts for FET devices and conducting lines

Inventor: Gordon C. Godejahn, Jr.
Patented Case View Patent ↗
Granted: Oct 23, 1984 Filed: Jul 12, 1982
Inventor
Gordon C. Godejahn, Jr.
Assignee (at issue)
Rockwell International Corporation

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Quick Facts
Patent No.
US 4,477,962
App. No.
06/397,050
Filed
1982-07-12
Granted
1984-10-23
Kind
A