Granted Patent
Utility
US 4,478,173 · App. 06/486,136
Method and apparatus for sensing and controlling the intensity of energy in a deposition system
Inventor:
Joachim Doehler
Patented Case
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Granted: Oct 23, 1984
Filed: Apr 18, 1983
Inventor
Joachim Doehler
Assignee (at issue)
Energy Conversion Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.