Granted Patent
Utility
US 4,481,406 · App. 06/459,745
Heater assembly for thermal processing of a semiconductor wafer in a vacuum chamber
Inventor:
Richard S. Muka
Patented Case
View Patent ↗
Granted: Nov 6, 1984
Filed: Jan 21, 1983
Inventor
Richard S. Muka
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.