IP Library › Granted Patent US 4,483,434
Granted Patent Utility
US 4,483,434 · App. 06/374,773

Apparatus for conveying semiconductor substrates

Inventors: Kenji Miwa, Noriyoshi Hashimoto
Patented Case View Patent ↗
Granted: Nov 20, 1984 Filed: May 4, 1982
Inventors
Kenji Miwa
Noriyoshi Hashimoto
Assignee (at issue)
Nippon Kogaku K.K.

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Quick Facts
Patent No.
US 4,483,434
App. No.
06/374,773
Filed
1982-05-04
Granted
1984-11-20
Kind
A